Patent Assignment
Reel/Frame 047894/0225
Assignment of Assignor's Interest
Recorded: 2019-01-03
Pages: 7
Assignors
JOCHEMSEN, MARINUS
Executed: 2016-07-28
HUNSCHE, STEFAN
Executed: 2016-08-04
TEL, WIM TJIBBO
Executed: 2016-07-29
Assignee
ASML NETHERLANDS B.V.
PO BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Predicting Patterning Defects Caused by Overlay Error