Patent Assignment
Reel/Frame 047948/0110
Assignment of Assignor's Interest
Recorded: 2019-01-10
Pages: 4
Assignors
QUEENS, RENE MARINUS GERARDUS JOHAN
Executed: 2015-09-01
KOOP, ERIK JOHAN
Executed: 2015-07-21
JUNGBLUT, REINER MARIA
Executed: 2015-07-21
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Methods for Controlling Lithographic Apparatus, Lithographic Apparatus and Device Manufacturing Method