Patent Assignment
Reel/Frame 047990/0202
Assignment of Assignor's Interest
Recorded: 2019-01-14
Pages: 6
Assignors
EMOTO, TETSUYA
Executed: 2016-12-22
EITOKU, ATSURO
Executed: 2016-12-26
IWATA, TOMOMI
Executed: 2016-12-14
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, NEW YORK, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.