Patent Assignment
Reel/Frame 048045/0914
Assignment of Assignor's Interest
Recorded: 2019-01-17
Pages: 8
Assignors
TEL, WIM TJIBBO
Executed: 2016-08-02
STAALS, FRANK
Executed: 2016-08-26
DE NIVELLE, MARTIN JULES MARIE-EMILE
Executed: 2016-08-02
HASAN, TANBIR
Executed: 2016-08-02
Assignee
ASML NETHERLANDS B.V.
PO BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Level Sensor Apparatus, Method of Measuring Topographical Variation Across a Substrate, Method of Measuring Variation of a Physical Parameter Related to a Lithographic Process, and Lithographic Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.