Patent Assignment
Reel/Frame 048049/0652
Assignment of Assignor's Interest
Recorded: 2019-01-17
Pages: 5
Assignors
TSAI, CHIA-CHING
Executed: 2018-11-28
CHIU, YI-WEI
Executed: 2018-11-28
HSU, LI-TE
Executed: 2018-11-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8 LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Manufacturing a Semiconductor Device with Metal Gate Etch Selectivity Control