Patent Assignment
Reel/Frame 048051/0833
Assignment of Assignor's Interest
Recorded: 2019-01-17
Pages: 5
Assignors
YANG, CHENG-HAN
Executed: 2018-11-20
WU, TSUNG-HAN
Executed: 2018-11-20
CHANG, CHIH-WEI
Executed: 2018-11-20
LIN, HSIN-MEI
Executed: 2018-11-20
HSIEH, I-CHUN
Executed: 2018-11-20
CHANG, HSI-YEN
Executed: 2018-11-20
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Anti-Reflective Coating by Ion Implantation for Lithography Patterning