Patent Assignment
Reel/Frame 048092/0313
Assignment of Assignor's Interest
Recorded: 2019-01-22
Pages: 2
Assignor
OTSUJI, MASAYUKI
Executed: 2019-01-09
Assignee
SCREEN HOLDINGS CO., LTD.
1-1, TENJINKITA-MACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Method of Restoring Collapsed Pattern, Substrate Processing Method, and Substrate Processing Device