Patent Assignment
Reel/Frame 048125/0869
Assignment of Assignor's Interest
Recorded: 2019-01-24
Pages: 3
Assignors
VAN ES, MAARTEN HUBERTUS
Executed: 2019-01-04
MARNANI, HAMED SADEGHIAN
Executed: 2019-01-03
Assignee
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
ANNA VAN BUERENPLEIN 1, 'S-GRAVENHAGE, 2595 DA, NETHERLANDS
Covered Property
(1)
Method of Determining an Overlay Error, Method for Manufacturing a Multilayer Semiconductor Device, Atomic Force Microscopy Device, Lithographic System and Semiconductor Device