Patent Assignment
Reel/Frame 048155/0766
Assignment of Assignor's Interest
Recorded: 2019-01-28
Pages: 7
Assignors
LEE, YONGWOO
Executed: 2018-12-27
NOH, YOUNGJIN
Executed: 2018-12-27
KIM, DOWON
Executed: 2018-12-27
NA, DONGHYEON
Executed: 2018-12-27
SHIM, SEUNGBO
Executed: 2018-12-27
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Electrostatic Chuck and Plasma Processing Apparatus Including the Same