Patent Assignment
Reel/Frame 048163/0640
Assignment of Assignor's Interest
Recorded: 2019-01-29
Pages: 2
Assignor
NEGORO, SEI
Executed: 2019-01-22
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus