Patent Assignment
Reel/Frame 048198/0201
Assignment of Assignor's Interest
Recorded: 2019-01-31
Pages: 3
Assignor
MASE, TOMOHIRO
Executed: 2018-10-29
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Lithography Apparatus, Lithography Method, Decision Method, Storage Medium, and Article Manufacturing Method