Patent Assignment
Reel/Frame 048204/0942
Assignment of Assignor's Interest
Recorded: 2019-01-31
Pages: 2
Assignee
SK SILTRON CO., LTD.
53 IMSU-RO, GUMI-SI, GYEONGSANGBUK-DO, 39386, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus and Method for Measuring Particle on Surface of Wafer