Patent Assignment
Reel/Frame 048229/0652
Assignment of Assignor's Interest
Recorded: 2019-02-04
Pages: 5
Assignors
LIU, TZUNG-SHIUN
Executed: 2018-10-22
CHEN, CHUN-LANG
Executed: 2018-10-24
CHEN, CHING-YUEH
Executed: 2018-10-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8 LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Apparatus and Method for Developing a Photoresist Coated Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.