Patent Assignment
Reel/Frame 048711/0495
Corrective Assignment to Correct the Assignee's Address Previously Recorded on Reel 048229 Frame 0652. Assignor(S) Hereby Confirms the Assignment.
Recorded: 2019-03-26
Pages: 7
Assignors
LIU, TZUNG-SHIUN
Executed: 2018-10-22
CHEN, CHUN-LANG
Executed: 2018-10-24
CHEN, CHING-YUEH
Executed: 2018-10-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Apparatus and Method for Developing a Photoresist Coated Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.