Patent Assignment
Reel/Frame 048237/0302
Assignment of Assignor's Interest
Recorded: 2019-02-05
Pages: 4
Assignors
LU, YEN-TIEN
Executed: 2019-02-01
YU, KAI-HUNG
Executed: 2019-01-17
METZ, ANDREW
Executed: 2019-02-01
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Metal Hard Mask Layers for Processing of Microelectronic Workpieces