Patent Assignment
Reel/Frame 048237/0363
Assignment of Assignor's Interest
Recorded: 2019-02-05
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and Apparatus for Plasma Processing