Patent Assignment
Reel/Frame 048251/0227
Assignment of Assignor's Interest
Recorded: 2019-02-06
Pages: 7
Assignors
KIM, KWANG-NAM
Executed: 2019-01-07
KIM, SUNG-YEON
Executed: 2019-01-07
KIM, HYUNG-JUN
Executed: 2019-01-07
SUN, JONG-WOO
Executed: 2019-01-07
OH, SANG-ROK
Executed: 2019-01-07
HONG, JUNG-PYO
Executed: 2019-01-07
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Support Apparatus and Plasma Processing Apparatus Having the Same