Patent Assignment
Reel/Frame 048256/0435
Assignment of Assignor's Interest
Recorded: 2019-02-06
Pages: 5
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Polishing Apparatus and Polishing Method