Patent Assignment
Reel/Frame 048261/0583
Assignment of Assignor's Interest
Recorded: 2019-02-07
Pages: 3
Assignor
POIESZ, THOMAS
Executed: 2015-06-25
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Substrate Support, Method of Compensating Unflatness of an Upper Surface of a Substrate, Lithographic Apparatus and Device Manufacturing Method