Patent Assignment
Reel/Frame 048263/0321
Assignment of Assignor's Interest
Recorded: 2019-02-07
Pages: 5
Assignors
XIA, CHUNGUANG
Executed: 2019-02-07
CHANDRASEKHARAN, RAMESH
Executed: 2019-02-04
KEIL, DOUGLAS
Executed: 2019-02-04
AUGUSTYNIAK, EDWARD J.
Executed: 2019-02-04
LEESER, KARL FREDERICK
Executed: 2019-02-04
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Suppression of Parasitic Deposition in a Substrate Processing System by Suppressing Precursor Flow and Plasma Outside of Substrate Region