Patent Assignment
Reel/Frame 048265/0948
Assignment of Assignor's Interest
Recorded: 2019-02-07
Pages: 3
Assignors
MINAMIDA, JUNYA
Executed: 2019-02-01
ITO, TATSUYA
Executed: 2019-02-01
TOYODA, YASUNORI
Executed: 2019-02-01
AOKI, DAISUKE
Executed: 2019-02-01
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus