Patent Assignment
Reel/Frame 048291/0675
Assignment of Assignor's Interest
Recorded: 2019-02-11
Pages: 8
Assignors
JAIN, AMIT
Executed: 2018-12-11
LE GOUIL, ANNE
Executed: 2018-12-13
ISHIKAWA, YASUSHI
Executed: 2018-12-11
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Etching Carbon Layer Using Doped Carbon as a Hard Mask