Patent Assignment
Reel/Frame 048294/0743
Assignment of Assignor's Interest
Recorded: 2019-02-11
Pages: 2
Assignors
ZHAO, KUI
Executed: 2018-08-15
LIU, SHENJIAN
Executed: 2018-08-15
NI, TUQIANG
Executed: 2018-08-15
Assignee
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) PUDONG, SHANGHAI, 201201, CHINA
Covered Property
(1)
Plasma Reactor Having a Variable Coupling of Low Frequency Rf Power to an Annular Electrode
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.