Patent Assignment
Reel/Frame 048310/0067
Assignment of Assignor's Interest
Recorded: 2019-02-12
Pages: 5
Assignors
CHUNG, JEN-YANG
Executed: 2018-08-14
HSIEH, CHIEH
Executed: 2018-08-14
CHIEN, SHANG-CHIEH
Executed: 2018-08-14
CHEN, LI-JUI
Executed: 2018-08-22
CHENG, PO-CHUNG
Executed: 2018-08-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8 LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Extreme Ultraviolet Control System for Adjusting Droplet Illumination Parameters
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.