Patent Assignment
Reel/Frame 048310/0187
Assignment of Assignor's Interest
Recorded: 2019-02-12
Pages: 3
Assignor
OKA, SHINSUKE
Executed: 2019-01-31
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Flow Rate Control Method, and Storage Medium Storing Flow Rate Control Program