Patent Assignment
Reel/Frame 048317/0816
Assignment of Assignor's Interest
Recorded: 2019-02-13
Pages: 6
Assignors
SATOH, HIRONORI
Executed: 2018-12-25
WATANABE, TSUKASA
Executed: 2018-12-25
TACHIBANA, SEIICHIRO
Executed: 2018-12-25
WATANABE, SATOSHI
Executed: 2018-12-25
OGIHARA, TSUTOMU
Executed: 2018-12-25
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process