Patent Assignment
Reel/Frame 048321/0056
Assignment of Assignor's Interest
Recorded: 2019-02-13
Pages: 5
Assignor
TSUJI, NORIHIKO
Executed: 2019-01-21
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Apparatus and Substrate Processing System comprising plural connection units arranged side by side in a vertical and lateral directions along one side surface of a transfer chamber