Patent Assignment
Reel/Frame 048342/0127
Assignment of Assignor's Interest
Recorded: 2019-02-15
Pages: 5
Assignors
WANG, DAIMIAN
Executed: 2016-09-06
ZHANG, SHENGRUI
Executed: 2016-09-11
FAN, CHI-HSIANG
Executed: 2016-09-06
Assignee
ASML NETHERLANDS B.V.
PO BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Automatic Selection of Metrology Target Measurement Recipes