Patent Assignment
Reel/Frame 048410/0517
Assignment of Assignor's Interest
Recorded: 2019-02-21
Pages: 7
Assignors
IKEDA, TARO
Executed: 2018-09-10
OSADA, YUKI
Executed: 2018-09-10
MIYASHITA, HIROYUKI
Executed: 2018-09-10
SAITO, SUSUMU
Executed: 2018-09-10
FURUKI, KAZUHIRO
Executed: 2018-09-10
SATO, MIKIO
Executed: 2018-09-10
KAMATA, EIKI
Executed: 2018-09-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Probe Device and Plasma Processing Apparatus