Patent Assignment
Reel/Frame 048430/0286
Assignment of Assignor's Interest
Recorded: 2019-02-25
Pages: 3
Assignors
LOUBET, NICOLAS
Executed: 2019-02-25
CONTI, RICHARD A.
Executed: 2019-02-25
LEE, CHOONGHYUN
Executed: 2019-02-25
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Forming Shallow Trench Isolation Regions for Nanosheet Field-Effect Transistor Devices Using Sacrificial Epitaxial Layer