Patent Assignment
Reel/Frame 048430/0552
Assignment of Assignor's Interest
Recorded: 2019-02-25
Pages: 4
Assignors
TIAN, XINKANG
Executed: 2019-02-12
MENG, CHING-LING
Executed: 2019-02-12
SUN, YAN
Executed: 2019-02-12
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Dark Field Wafer Nano-Defect Inspection System with a Singular Beam