Patent Assignment
Reel/Frame 048454/0570
Assignment of Assignor's Interest
Recorded: 2019-02-27
Pages: 10
Assignors
PARK, CHANRO
Executed: 2019-02-22
XIE, RUILONG
Executed: 2019-02-22
CHENG, KANGGUO
Executed: 2019-02-22
LEE, CHOONGHYUN
Executed: 2019-02-27
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Extreme Ultraviolet Patterning Process with Resist Hardening