Patent Assignment
Reel/Frame 048463/0355
Assignment of Assignor's Interest
Recorded: 2019-02-28
Pages: 3
Assignors
POLYAKOV, ALEXEY OLEGOVICH
Executed: 2015-08-17
QUINTANILHA, RICHARD
Executed: 2015-08-27
BANINE, VADIM YEVGENYEVICH
Executed: 2015-08-20
VERSCHUREN, COEN ADRIANUS
Executed: 2015-08-24
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Methods, Radiation Source, Metrology Apparatus and Device Manufacturing Method