Patent Assignment
Reel/Frame 048463/0763
Assignment of Assignor's Interest
Recorded: 2019-02-28
Pages: 2
Assignors
OGAWA, SHUHEI
Executed: 2019-02-06
TOYODA, KEIGO
Executed: 2019-02-06
KIHARA, YOSHIHIDE
Executed: 2019-02-06
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Processing Workpiece