Patent Assignment
Reel/Frame 048465/0003
Assignment of Assignor's Interest
Recorded: 2019-02-28
Pages: 3
Assignor
ABEL, PAUL
Executed: 2019-02-28
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Wet Atomic Layer Etching Using Self-Limiting and Solubility-Limited Reactions