Patent Assignment
Reel/Frame 048507/0557
Assignment of Assignor's Interest
Recorded: 2019-03-05
Pages: 6
Assignors
MUN, JEONGIL
Executed: 2019-02-01
LEE, HYUNG JOO
Executed: 2019-02-01
SUN, JONGWOO
Executed: 2019-02-01
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Optical Emission Spectroscopy System, Method of Calibrating the Same, and Method of Fabricating Semiconductor Device