Patent Assignment
Reel/Frame 048520/0655
Assignment of Assignor's Interest
Recorded: 2019-03-06
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Measuring Device and Method for Obtaining Amount of Deviation of Measuring Device