Patent Assignment
Reel/Frame 048526/0421
Assignment of Assignor's Interest
Recorded: 2019-03-07
Pages: 5
Assignors
CHANDRA, HARIPIN
Executed: 2019-03-05
WANG, MEILIANG
Executed: 2019-03-05
XIAO, MANCHAO
Executed: 2019-03-05
LEI, XINJIAN
Executed: 2019-03-05
PEARLSTEIN, RONALD MARTIN
Executed: 2019-03-05
O'NEILL, MARK LEONARD
Executed: 2019-03-05
Assignee
VERSUM MATERIALS US, LLC
8555 SOUTH RIVER PARKWAY, PATENT DEPT., TEMPE, ARIZONA, 85284
Covered Property
(1)
High Temperature Atomic Layer Deposition of Silicon Oxide Thin Films