Patent Assignment
Reel/Frame 048531/0640
Assignment of Assignor's Interest
Recorded: 2019-03-07
Pages: 3
Assignors
HSIEH, HUNG-CHIH
Executed: 2019-02-19
CHEN, KAI-HSIUNG
Executed: 2019-02-19
CHENG, PO-CHUNG
Executed: 2019-02-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Overlay Marks for Reducing Effect of Bottom Layer Asymmetry