Patent Assignment
Reel/Frame 048550/0141
Assignment of Assignor's Interest
Recorded: 2019-03-08
Pages: 3
Assignor
HUANG, CHUN--HSI
Executed: 2019-02-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Chemical Mechanical Polishing Apparatus and Method