Patent Assignment
Reel/Frame 048573/0846
Assignment of Assignor's Interest
Recorded: 2019-03-12
Pages: 7
Assignors
KOCH, MARKUS
Executed: 2019-02-27
HELLWEG, DIRK
Executed: 2019-02-25
CAPELLI, RENZO
Executed: 2019-03-04
DIETZEL, MARTIN
Executed: 2019-02-21
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Determining a Focus Position of a Lithography Mask and Metrology System for Carrying Out Such a Method