Patent Assignment
Reel/Frame 048592/0211
Assignment of Assignor's Interest
Recorded: 2019-03-14
Pages: 3
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Apparatus, Method of Measuring a Structure, Device Manufacturing Method