Patent Assignment
Reel/Frame 048641/0250
Assignment of Assignor's Interest
Recorded: 2019-03-19
Pages: 9
Assignors
ISOBE, NORIYUKI
Executed: 2019-01-07
SUZAKI, KENICHI
Executed: 2019-01-07
KASAI, TAKESHI
Executed: 2018-12-28
KAWAHARA, YOSHITAKA
Executed: 2018-12-28
SHIMADA, MASAKAZU
Executed: 2018-12-28
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO,, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Liquid Precursor Replenishment System, and Method of Manufacturing Semiconductor Device