Patent Assignment
Reel/Frame 048661/0572
Assignment of Assignor's Interest
Recorded: 2019-03-21
Pages: 3
Assignors
TAHARA, SHIGERU
Executed: 2019-03-19
SEKI, NOBUAKI
Executed: 2019-03-19
KATO, TAKAHIKO
Executed: 2019-03-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method