Patent Assignment
Reel/Frame 048661/0846
Assignment of Assignor's Interest
Recorded: 2019-03-21
Pages: 7
Assignors
ZHANG, CHEN
Executed: 2019-03-20
YAMASHITA, TENKO
Executed: 2019-03-21
CHENG, KANGGUO
Executed: 2019-03-19
GLUSCHENKOV, OLEG
Executed: 2019-03-21
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Stacked Vertical Field-Effect Transistors with Sacrificial Layer Patterning