Patent Assignment
Reel/Frame 048682/0933
Assignment of Assignor's Interest
Recorded: 2019-03-25
Pages: 4
Assignor
MATTSON THERMAL PRODUCTS GMBH
Executed: 2016-10-04
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Substrate Breakage Detection in a Thermal Processing System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 25, 2019
From: CIBERE, JOSEPH
To: MATTSON THERMAL PRODUCTS GMBH
Reel/Frame 048682/0903 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →