Patent Assignment
Reel/Frame 048684/0536
Assignment of Assignor's Interest
Recorded: 2019-03-25
Pages: 2
Assignee
VERSUM MATERIALS US, LLC
8555 SOUTH RIVER PARKWAY, PATENT DEPT., TEMPE, ARIZONA, 85284
Covered Property
(1)
Etching Solution for Selectively Removing Silicon-Germanium Alloy from a Silicon-Germanium/ Germanium Stack During Manufacture of a Semiconductor Device