Patent Assignment
Reel/Frame 048693/0686
Assignment of Assignor's Interest
Recorded: 2019-03-25
Pages: 4
Assignors
LEE, CHIA-YU
Executed: 2019-03-13
CHEN, TAO-HSIN
Executed: 2019-03-13
HUANG, CHING-JUINN
Executed: 2019-03-13
CHENG, PO-CHUNG
Executed: 2019-03-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Reticle and Method of Detecting Intactness of Reticle Stage Using the Same