Patent Assignment
Reel/Frame 048712/0347
Assignment of Assignor's Interest
Recorded: 2019-03-27
Pages: 7
Assignors
YANG, CHIH-CHAO
Executed: 2019-03-20
TANG, HAO
Executed: 2019-03-25
METZLER, DOMINIK
Executed: 2019-03-21
PEETHALA, CORNELIUS BROWN
Executed: 2019-03-25
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Lithographic Photomask Alignment Using Non-Planar Alignment Structures Formed on Wafer
Patent:
10,534,276 →
Application:
16/365,992 →