Patent Assignment
Reel/Frame 048778/0955
Assignment of Assignor's Interest
Recorded: 2019-04-03
Pages: 7
Assignors
BALLANDRAS, SYLVAIN
Executed: 2018-12-13
LAROCHE, THIERRY
Executed: 2018-12-13
MATSUSE, KEN
Executed: 2018-12-07
BERG, JACQUES
Executed: 2018-12-14
MINAMI, TOMOHIDE
Executed: 2019-04-03
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus and Method for Real-Time Sensing of Properties in Industrial Manufacturing Equipment